PI Launches V-783 XY Stage for Semiconductor Inspection

The V-783 utilizes a monolithic XY configuration, providing greater structural stiffness and a lower profile than traditional stacked-axis designs. By incorporating direct-drive brushless ironless linear motors, the system eliminates backlash and mechanical drivetrain interference, ensuring smooth motion during high-speed operations. The stage achieves bidirectional repeatability of ±0.07 micrometers and supports velocities reaching 1 meter per second.

Designed for integration into complex automation environments, the unit includes an optional absolute encoder that removes the need for power-up homing routines. When paired with PI’s A-800 ACS-based controllers, the platform supports EtherCAT networking and synchronized multi-axis control. With a load capacity of up to 50 kilograms and a 360 by 360 millimeter open aperture, the stage serves as a robust solution for photonics alignment, laser micro-processing, and flat-panel display inspection.